Beam Delivery Techniques

The method of delivering the UV excimer laser beam from the laser to the part processing site depends on your application. There are numerous methods of conditioning the beam along its path including using different optics and motion control devices. The following topics address beam delivery issues and applications:

• Contact Mask Processing
• Masks
• Imaging Systems
• Long Working Distance Optical Systems
• Microscope Imaging Systems
• Refractive Objectives
• Reflective Objectives
• Beam Conditioning for Reflective Objective Systems
• Part Viewing in Microscope Systems
• Beam Homogenization
• Beam Shaping
• Geometrical Beam Division
• Motion-controlled Beam Delivery
• Scanning Illumination Schemes
• Coordinated Opposing Motion Imaging
• Direct Write Machining
• Optical System Design Issues

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