Commercial Excimer Laser Configuration

The following is a block diagram of a commercial laser configuration:

The components included in this configuration are:

Laser head

• Electrodes, preionization pins, rails
• Electrostatic particle precipitators
• Cooling fans
• Blower assembly

Pulse forming network

• Thyratron switch
• Magnetic pulse compression
• Storage capacitors

Energy monitor

• Beam sampling optics
• Photodiode detector
• A/D circuitry

Gas handling system

• Interlock control
• Gas manifold
• Solenoid valves

HV supply

• Switched mode type
• Delivers stabilized DC high voltage at 15-25 KV

Computer control system

• Automated energy stabilization
• Automated gas adjustments and refills
• Noise immune communication with other subsystems, typically fiber optic
  

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