Commercial Excimer Laser Configuration
The following is a block diagram of a commercial laser configuration:

The components included in this configuration are:
Laser head
- Electrodes, preionization pins, rails
- Electrostatic particle precipitators
- Cooling fans
- Blower assembly
Pulse forming network
- Thyratron switch
- Magnetic pulse compression
- Storage capacitors
Energy monitor
- Beam sampling optics
- Photodiode detector
- A/D circuitry
Gas handling system
- Interlock control
- Gas manifold
- Solenoid valves
HV supply
- Switched mode type
- Delivers stabilized DC high voltage at 15-25 KV
Computer control system
- Automated energy stabilization
- Automated gas adjustments and refills
- Noise immune communication with other subsystems, typically fiber optic
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